3D Numerical Simulation and Structural Optimization for a MEMS Skin Friction Sensor in Hypersonic Flow.

The skin friction of a hypersonic vehicle surface can account for up to 50% of the total resistance, directly affecting the vehicle's effective range and load. A wind tunnel experiment is an important and effective method to optimize the aerodynamic shape of aircraft, and Micro-Electromechanical System (MEMS) skin friction sensors are considered the promising sensors in hypersonic wind tunnel experiments, owing to their miniature size, high sensitivity, and stability. However, the sensitive structure including structural appearance, a gap with the package shell, and flatness of the sensor will change the measured flow field and cause the accurate measurement of friction resistance. Aiming at the influence of sensor-sensitive structure on wall-flow characteristics and friction measurement accuracy, the two-dimensional and three-dimensional numerical models of the sensor in the hypersonic flow field based on Computational Fluid Dynamics (CFD) are presented respectively in this work. The model of the sensor is verified by using the Blathius solution of two-dimensional laminar flow on a flat plate. The results show that the sensor model is in good agreement with the Blathius solution, and the error is less than 0.4%. Then, the influence rules of the sensitive structure of the sensor on friction measurement accuracy under turbulent flow and laminar flow conditions are systematically analyzed using 3D numerical models of the sensor, respectively. Finally, the sensor-sensitive unit structure's design criterion is obtained to improve skin friction's measurement accuracy.